Overview of Vacuum Technology

Overview of Vacuum Technology provides the reader a broad treatment of typical systems and components used in the critical field of vacuum technology. It demonstrates where and why certain vacuum components are used in this rapidly evolving area of science. It develops the reader's understanding of how to effectively establish vacuum equipment that will meet both their present and near-future needs. This important reference offers guidance on “costs of ownership” concerns for initial purchase and other less-understood costs related to operation and maintenance. This foundation will allow technologists and researchers to acquire vacuum equipment capable of producing a required level of reproducibility, as well as maintain the vacuum equipment within the research and production budgets.

This important book:

• Provides definitions and use cases, principles and key applications, procedures, and data evaluation
• Discusses the development of gas laws, the transport of gas molecules, and vacuum chamber outgassing
• Presents descriptions and selection advice for critical components such as gauges, pumps, valves, chambers, feedthroughs, and flanges

Scientists, engineers, and technologists in semiconductor electronics, photovoltaics, energy, and materials science will find this an invaluable reference. Educators and researchers interested in vacuum technology will also find this book a useful resource.